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MEMSnet Home: MEMS-Talk: Etchant for SiO2 without etching Aluminum
Etchant for SiO2 without etching Aluminum
2005-02-18
Ramesh Narayanan
2005-02-21
Ramesh Narayanan
2005-02-22
ZICKAR Michaƫl
Etchant for SiO2 without etching Aluminum
Ramesh Narayanan
2005-02-18
Hi,
I am have deposited aluminum on SiO2. I have etched the aluminum
leaving finally a SiO2 and small square of aluminum pattern, could you
please suggest me an etchant which can etch SiO2 with out etching
Aluminum and also could you please suggest whether I could Photo resit
as the mask.
Thanks
Ramesh
reply
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