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MEMSnet Home: MEMS-Talk: PDMS-glass bonding
PDMS-glass bonding
2005-02-18
Shramik Sengupta
2005-02-20
Taegon Kim
2005-02-23
Adrian Brozell
PDMS-glass bonding
Taegon Kim
2005-02-20
Hi Arun.

I had a same problem. How much power applies to treat plasma?
If you apply 10 sec for 100 W or 1 min for 30 W, it is possible to bond, but
it depends on system.
I succeeded 20~30 W, 1 min in ICP and CCP type plasma system.
Using Harrick's basic plasma cleaner which has max. 18 W it is possible to
bond it during 1 min treatment.
It is need to treat PDMS and glass at the same time.
If not it is hard to bond in my experience.

Tae-Gon Kim, Ph.D. Student

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