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MEMSnet Home: MEMS-Talk: MBE growth chamber leakage
MBE growth chamber leakage
2005-02-21
Idris Sabtu
2005-02-22
Azmi Ibrahim
MBE growth chamber leakage
Idris Sabtu
2005-02-21
Hi all,

Who knows how to detect leakage on MBE growth chamber. Recently I have
changed some sources and replaced the old gaskets with the new one. However
I failed to decrease the pressure using the cryo pump. Normally the pressure
inside the growth chamber after pumping down can reach minus-4 Torr but now
it is even hard to reach minus-1 Torr. I have done a lot ways to solve this
problem such as tightening back all the screws opened, checking the leakage
with the Helium gas, changing back the gaskets for many times and some other
ways that might give some positve feedback. But all them could solve the
problems. Hope someone can help me. Thank you.

Idris Sabtu
Telekom R&D
Malaysia

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