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MEMSnet Home: MEMS-Talk: resist compatible with PMMA
resist compatible with PMMA
2005-02-21
Josef Kouba
resist compatible with PMMA
Josef Kouba
2005-02-21
Dear community members,

I am looking for a resist which is compatible with PMMA process, especially
with the lift-off process. with other words, the resist should withstand N,N
dimethylformamid as well as PMMA developer. The Thickness of the resist
should be around 2-3 um.

Thanks for your answer.

regards

J.Kouba

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