A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: review on HF etching
review on HF etching
2005-02-21
mi orni
2005-02-22
Dwayne Dunaway
2005-02-24
SPOERL Christian
review on HF etching
Dwayne Dunaway
2005-02-22
Hello,

I do not have any reviews for you but I have been doing a bit of glass etching
in HF lately.

I am doing about a 140 um etch in 49% HF.  I have not seen much difference in
etch rates between different borosilcates.  Soda lime was mess...hard to even
find my glass through all the deposites.

I have used both amorphous silicon (7500A with PEVCD) and Gold (5000A with 100A
Cr).  I think the amorphous silicon held up a bit better but the jury is still
out.  In either case, make sure your substrate is extremely clean.

Let me know if you find any good reviews,

Dwayne

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
University Wafer
MEMStaff Inc.
Nano-Master, Inc.