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MEMSnet Home: MEMS-Talk: V-groove surface roughness measurment
V-groove surface roughness measurment
2005-02-22
guda reddy
V-groove surface roughness measurment
guda reddy
2005-02-22
 Â
Hello All,

          I have etched <100> silicon in KOH and produced v-grooves in it. I
would like to measure the surface roughness of the slanted wall. I came to know
that optical profilometer can be used to measure it. If its the one could you
please send me details about how to do it. I would really appreciate for your
help.

Thank You All,
Dhanamjaya R Guda
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