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MEMSnet Home: MEMS-Talk: PDMS-glass bonding
PDMS-glass bonding
2005-02-18
Shramik Sengupta
2005-02-20
Taegon Kim
2005-02-23
Adrian Brozell
PDMS-glass bonding
Adrian Brozell
2005-02-23
Hey All,

You should be sure to oxidize your glass when doing the bonding.  You
can do this chemically with a Phirana etch solution (4 sulfiric acid : 1
hydrogen peroxide) for 3 minutes right after mixing above 100 C.

Adrian

reply
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