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MEMSnet Home: MEMS-Talk: Peel off silicone
Peel off silicone
2005-02-23
Annik
Peel off silicone
Annik
2005-02-23
Hello everybody,

Does anyone know how I can easily peel off silicone from a silicon wafer?
The silicone layer is approx. 100µm and is spin coated on the wafer.

Thanks a lot,

Annik De Boeck

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