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brass Cantilever
2005-03-02
Ramesh Narayanan
2005-03-02
David Springer
brass Cantilever
Ramesh Narayanan
2005-03-02
Hi,
I want to make array of brass cantilevers on <100> si substrate. First
i will deposit brass on top of substrate using PVD.Later I will
transfer the image on the PR( here i dont know which chemical use for
etching brass - suggest me what chemical i should use to etch brass).
once this process is done  I want to use 30% KOH to under etch the Si
to finally get the cantilevers.

I want to know what chemical to use to etch brass and also is there
any other way to fabricate metal cantilevers.
Thanks
Ramesh Narayanan
Syracuse University

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