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MEMSnet Home: MEMS-Talk: XYZ-Theta stage in the vacuum?
XYZ-Theta stage in the vacuum?
2005-03-02
Bill Moffat
2005-03-02
Russell, James C
2005-03-02
Daniel Lloyd
XYZ-Theta stage in the vacuum?
Daniel Lloyd
2005-03-02
Could you not use a standard SEM microscope table? These will often be
capable of these motions. If you need high accuracy piezo or laser
stages are accurate to sub micron levels.

Daniel

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