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MEMSnet Home: MEMS-Talk: clean after si etch by KOH
clean after si etch by KOH
2005-03-03
Danielq k
clean after si etch by KOH
Danielq k
2005-03-03
hi all
 How to clean surface after Si etch by KOH. My wafers have SiO2 as
mask and no metal inside.
Thanks
Daniel

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