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MEMSnet Home: MEMS-Talk: HSQ Vs. NEB
HSQ Vs. NEB
2005-03-04
Lee, Duhyun
2005-03-04
William Lanford-Crick
HSQ Vs. NEB
Lee, Duhyun
2005-03-04
Hi MEMS-Talkers,

I need a negative e-beam resist as a mask for dry etching and
electroplating.

What is your opinion on these resist of HSQ and NEB for my purpose
regarding etch resistance, resolution, removal, and handling of the resist?



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