Hi Duhyun,

You are right, teflon-like layer is perfect for this
application. I would recommend a new, so called MVD
technology (molecular vapor deposition). It allows you
to deposit composite organic/inorganic layer from a
vapor phase (in a vacuum chamber). For example, FDTS
(perfluorodecyltrichlorosilane)-based layers will give
you an excellent release performance. MVD technique
improves mechanical and thermal stability (you need it
for imprint application) in comparison to just a
regular SAM (self-assembled monolayers).

Boris Kobrin
Applied Microstructures, Inc.
(408) 594-0654
[email protected]
www.appliedmst.com