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MEMSnet Home: MEMS-Talk: HNA on Su-8
pzt!
2005-03-08
[email protected]
HNA on Su-8
2005-03-09
Vikas Nair
HNA on Su-8
Vikas Nair
2005-03-09
I have a structure made of Su-8 and want to release it using
isotropic/anisotropic etching of silicon substrate...
Please let me know which is the best method...
Thanks a lot

regards
Vikas


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