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MEMSnet Home: MEMS-Talk: Reliability of Ti-Au metal stack
Reliability of Ti-Au metal stack
2005-03-09
Krasniansky Vladimir
TaN etching
2005-03-09
li cai
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2005-03-23
Suk Sang Chang
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CY Hsieh 謝吉勇
Reliability of Ti-Au metal stack
Krasniansky Vladimir
2005-03-09
Hi all,
 Did anyone know about reliability problems when Ti-Au films used for
GaAs metalization?
Diffusion, self induced corrosion or something like this?
 [email protected]

Sincerely,

Vladimir Krasniansky.

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