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MEMSnet Home: MEMS-Talk: Indium soldering
Indium soldering
2005-03-09
Zhiyan Liu
Steppr inside vacuum?
2005-03-09
Andrew Xiang
2005-03-10
David Nemeth
what stepper motor to do inside vacuum?
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Andrew Xiang
2005-03-09
Yu, Keven
Indium soldering
Zhiyan Liu
2005-03-09
Hi, friends

I am trying to do flip chip bonding using Indium as soldering material. The
indium is electroplated for 2um thick and then patterned with the feature
size about 30um. I tried the bonding temperature about 250C for 5 minutes,
but the bonding strength is so weak and it is easily break apart.

As I know the oxide formed on the indium is the reason for the weak and
unreliable bonding, so i tried to etch off the oxide by dipping it in HCl
for 5 minutes, but apparently it doesn't improve the bonding.

I am wondering anyone can give me some suggestion on the selection of
solder material, and Indium solder process.

Thank you so much,

Zhiyan
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