Once a while, there is a request, how to etch silicon
without attacking fragile mems structure. XeF2 is an
excellent option, how to do it. We have made our own
systems (3 units) as they are trivial to be run in a
"pulse" mode pioneered by Kris Pister in Berkeley. If
anybody in interested to know details, let me know.
[email protected]
[email protected]




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