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MEMSnet Home: MEMS-Talk: how to wet etch Mn and Co?
how to wet etch Mn and Co?
2005-03-10
Kirkness Jeoffrey
how to wet etch Mn and Co?
Kirkness Jeoffrey
2005-03-10
hi,

  Does anyone know any commercial etchant that is designed for wet
etching Mn and Cobalt without attacking resist?

reply
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