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MEMSnet Home: MEMS-Talk: Si/Au Ohmic Contact
Si/Au Ohmic Contact
2005-03-11
Eric J. Correa
2005-03-12
li cai
2005-03-12
[email protected]
Si/Au Ohmic Contact
Eric J. Correa
2005-03-11
Hello Everyone:

I am trying to make an ohmic contact between gold and
silicon to perform some electrical measurements.  I would
like to know the annealing temperature to create an ohmic
contact between Si/Au.  Any recommendation for this process
will be also helpful.

Thanks in advance;

Eric J. Correa Rivera
Graduate Student
Mechanical Engineering
University of Illinois at Urbana Champaign

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