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MEMSnet Home: MEMS-Talk: Si/Au Ohmic Contact
Si/Au Ohmic Contact
2005-03-11
Eric J. Correa
2005-03-12
li cai
2005-03-12
[email protected]
Si/Au Ohmic Contact
li cai
2005-03-12
Add Ni between Au and Si may help adhesion.

Li
> I am trying to make an ohmic contact between gold and
>silicon to perform some electrical measurements.  I would
>like to know the annealing temperature to create an ohmic
>contact between Si/Au.
reply
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