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MEMSnet Home: MEMS-Talk: AZ4620 Removal after High temperature Bake
AZ4620 Removal after High temperature Bake
2005-03-09
Michael
2005-03-10
Kasman , Elina
2005-03-11
CY Hsieh 謝吉勇
2005-03-14
Russell Davies
AZ4620 Removal after High temperature Bake
Russell Davies
2005-03-14
Hi,
Rohm & Haas (formally Shipley) have a very good range of polymer &
photoresist strippers which may work. Otherwise you could use a release
layer based on PMGI or LOR from Micro Chem Corp.

Regards,

Russell A Davies

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