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MEMSnet Home: MEMS-Talk: PDMS thickness variation with spin speed and time.
PDMS thickness variation with spin speed and time.
2005-03-15
Kapil Sahasrabudhe
2005-03-15
[email protected]
2005-03-15
Gary
2005-03-15
[email protected]
2005-03-16
[email protected]
2005-03-16
[email protected]
2005-03-16
[email protected]
2005-03-16
Kapil Sahasrabudhe
2005-03-15
Z.,W.Y.(Lydia)
2005-03-16
karim faid
2005-03-17
Z.,W.Y.(Lydia)
PDMS thickness variation with spin speed and time.
Kapil Sahasrabudhe
2005-03-15
Hi,

I want to spin coat a 500 micron PDMS (Sylgard 184) layer on a Si wafer. I
have been trying to find any published literature presenting variation in
PDMS layer thickness with spin speed and spin time, but haven't find any. I
would appreciate your suggestions.

Thanks

Kapil

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