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MEMSnet Home: MEMS-Talk: Cr/Cu
Cr/Cu
2005-03-17
呂冠瑩
Cr/Cu
呂冠瑩
2005-03-17
Hello,

Could anyone help me to solve the problem of etchnig Cr/Cu?
The Cu is on top of the Cr.

I have known I could do lift-off.
But, is there any possible having etchant could etch Cr and couldn't etch Cu?

Best Regards!

Pete
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