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MEMSnet Home: MEMS-Talk: AHW
AHW
2005-03-18
Francesca Cavallo
AHW
Francesca Cavallo
2005-03-18
I'm looking for a plot data of AHW (Ammonium hydroxide-water) etching rate vs
the boron doping level for a silicon layer. Can anybody help me?
Thank you!

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