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MEMSnet Home: MEMS-Talk: PECVD PolySi Deposition
PECVD PolySi Deposition
2005-03-11
[email protected]
2005-03-14
Michael D Martin
2005-03-18
Isaac Wing Tak Chan
2005-03-18
li cai
PECVD PolySi Deposition
Isaac Wing Tak Chan
2005-03-18
It may mean Al-Induced-Crystallization. Just a guess.

Isaac

On Mon, 14 Mar 2005, Michael D Martin wrote:

> Hi Li,
>    What is AIC anneal?

reply
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