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MEMSnet Home: MEMS-Talk: Silicone DRIE
Silicone DRIE
2005-03-18
Lidija Malic
Silicone DRIE
Lidija Malic
2005-03-18
Hello everyone,
I am looking for a Si DRIE etch service to process 6" wafers. I need to etch
57um deep trenches with vertical sidewalls that have rectangular geometry and
are 720um wide and 2mm long. I would like to start with 2 or 3 wafers for
beginning.
Thank you,
Lidija

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