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MEMSnet Home: MEMS-Talk: how to protect viton o-ring from plasma?
the problem of etchnig Cr/Cu
2005-03-18
Cheng Ming Lin
2005-03-18
Kirt Williams
how to protect viton o-ring from plasma?
2005-03-20
Andrew Xiang
how to protect viton o-ring from plasma?
Andrew Xiang
2005-03-20
Hi, folks,
I think the plasma is eating into the viton o-ring inside the vacuum
chamber? What can I do to avoid that? dc plasma 300W, 15pascal pressure.

thanks
Andrew

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