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MEMSnet Home: MEMS-Talk: Have problem with Lift-off !!
Have problem with Lift-off !!
2005-03-20
William Lanford-Crick
Have problem with Lift-off !!
William Lanford-Crick
2005-03-20
Hello,
We had a similar problem in the past, when using 319
developer to remove the LOR when Al is on the sample.

You can do the lift-off using an NMP-based stripper (we use
Nanoremover PG from Microchem) at elevated temperatures
(about 80 deg. C for 30 seconds).

It works for us--give it a try.

-Bill

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