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MEMSnet Home: MEMS-Talk: is viton safe in plasma environment?
where can I buy big photoresistor plate(bigger than 40"*40")
2005-03-20
li xuan
is viton safe in plasma environment?
2005-03-20
Andrew Xiang
is viton safe in plasma environment?
Andrew Xiang
2005-03-20
I wonder if my door viton sealing is deterioating under DC plasma
glow-discharge.
I feel same effect with either Ar plasma and O2 plasma. Is it true that any
plasma will eat away the viton? What can I do to avoid that? I saw Kalrez
material from Dupont that is plasma resistant. Maybe I need to change the
o-ring.

thanks
Andrew

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