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MEMSnet Home: MEMS-Talk: Have problem with Lift-off !!
Have problem with Lift-off !!
2005-03-19
ahajjiah
2005-03-20
Isaac Wing Tak Chan
2005-03-20
Wilson, Thomas
2005-03-21
li cai
Have problem with Lift-off !!
Isaac Wing Tak Chan
2005-03-20
Yes, AZ400K is a diluted KOH solution (perhaps that's what the "K" means),
which etches Al. Can you just use acetone to dissolve your photoresist?

Yours sincerely,

Isaac Chan, Ph.D.
University of Waterloo

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