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MEMSnet Home: MEMS-Talk: Have problem with Lift-off !!
Have problem with Lift-off !!
2005-03-19
ahajjiah
2005-03-20
Isaac Wing Tak Chan
2005-03-20
Wilson, Thomas
2005-03-21
li cai
Have problem with Lift-off !!
li cai
2005-03-21
Besides thinning Al, what other impacts AZ351 developer has on Al films?
Will it make the surface rough or change the properties of the films, such
as etching grain boundaries of Al?

Thanks,

Li


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