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MEMSnet Home: MEMS-Talk: Problems with Lift-off
Problems with Lift-off
2005-03-21
Rameez Chatni
2005-03-22
Jesse D Fowler
2005-03-21
Washington, Erika B
2005-03-21
ahajjiah
Problems with Lift-off
ahajjiah
2005-03-21
I think you need to make sure that your photoresist thickness is much much
thicker than your metal deposition thickness. So, it seems to me that you have
1400A of metal deposited. Make sure that your photoresist is at least 2 X
metal thickness.

hope this can help

reply
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