A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: unexpected electorplating
Reliability of Ti-Au metal stack
2005-03-09
Krasniansky Vladimir
TaN etching
2005-03-09
li cai
unexpected electorplating
2005-03-23
Suk Sang Chang
2005-03-11
CY Hsieh 謝吉勇
unexpected electorplating
Suk Sang Chang
2005-03-23
Hi doing.
 We are making the mask for Deep X-ray lithography.
Whenever we try to electroplate the gold on the Si substrate with seed layer
Au/Cr. It appears the phenomenon to permeate into the bottom, to plate on
bottom and to raise the PR.
Could you give me some suggestions on how to solve this problem?
Then I really appreciate that.

Suk Sang Chang
[email protected]
POSTECH/PAL
Korea





reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Process Variations in Microsystems Manufacturing
University Wafer
The Branford Group