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MEMSnet Home: MEMS-Talk: Cracks in glass wafer during anodic bonding
Cracks in glass wafer during anodic bonding
2005-03-23
Andreas Jahn
2005-03-23
Shane Arthur McColman
2005-03-24
[email protected]
2005-03-24
Kirt Williams
2005-03-23
[email protected]
2005-03-24
BRAD JOHNSON
Cracks in glass wafer during anodic bonding
[email protected]
2005-03-23
Andreas,
Sounds like trapped gas bubbles that crack the glass to escape.
try bonding in vacuum
Shay
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