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MEMSnet Home: MEMS-Talk: Question on etchant for the AlOx not for ZnO
Question on etchant for the AlOx not for ZnO
2005-03-24
aj jeff
Question on etchant for the AlOx not for ZnO
aj jeff
2005-03-24
Hi, all,

     I am looking for one method or some kind of
etchant to remove the sputtered AlOx, but not for ZnO.
Anyone can help me!

Best

reply
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