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MEMSnet Home: MEMS-Talk: Hillock formation on Au surface
Hillock formation on Au surface
2005-03-24
Steven McMaster
Hillock formation on Au surface
Steven McMaster
2005-03-24
Using sputtered Ti/Pt/Au (350nm) stack on GaAs devices shows no signs of
hillock formation; however Ti/Pt/Au (1000nm) shows hillocks at the Au
surface. What is the mechanism of this hillock formation and does anyone
know why it is evident using thicker Au films? Even more so, does anyone
know how to avoid them?

Regards,
Steven.


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