We have the IBS/E system for ion sputtering uniform ultrathin films onto SEM
samples for high resolution imaging.  People frequently use Ir for this purpose.
The system is capable of doing thicker films.  We do not know whether the very
fine structure of this film would pass the scratch and peel test, but if you are
interested, we can try it for you.  The system can also be equipped with an etch
gun for treating the sample.

Another possibility is to use ion beam assisted deposition (IBAD).  This
typically will give denser films that are stress-relieved and are typically very
well adhered.

-Scott