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MEMSnet Home: MEMS-Talk: Plasma etching with sloped sidewalls.
Plasma etching with sloped sidewalls.
2005-03-30
Bruce Altemus
2005-03-30
Isaac Wing Tak Chan
2005-03-30
Shane Arthur McColman
2005-03-30
Bruce Altemus
2005-03-30
Isaac Wing Tak Chan
2005-03-31
Robert Dean
2005-03-31
Wilson, Thomas
2005-04-06
[email protected]
Plasma etching with sloped sidewalls.
Bruce Altemus
2005-03-30
Hello everyone,

I am attempting to generate a sloped side wall with an angle of ~85 degrees
using a fluorine chemistry etching silicon. The mask being used in this
application is Cr. I have seen several papers on a combined bosch but this
has not proved to be successful in my case. I continue to get very nice
anisotropic etching. Thanks for your assistance.

Bruce Altemus


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