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MEMSnet Home: MEMS-Talk: Stripping Off metal
Stripping Off metal
2005-03-30
ahajjiah
2005-03-30
Neal Ricks
Stripping Off metal
ahajjiah
2005-03-30
Dear All,

I have a Ti/Al metalization on a GaN wafer. I have tried to strip off the
metals by using Aqua Regia (3:1 HCL:HNO3). I left the sample in the acid for 6
hrs. It seems that most of the metals got stripped off, but there are still
some metals on the sample.

Any suggestions on how to remove the metals completely?

Thanks
ALI

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