MEMS-talk

News	MEMSnet Home: MEMS-Talk: How to do the lift off process after aluminumdeposition? It is negative resist. How to do the lift off process after aluminum deposition? It is negative resist. 2005-03-31 Duan How to do the lift off process after aluminumdeposition? Itis negative resist. 2005-03-31 Jesse D Fowler microstructured Pt thermal sensor 2005-04-01 Erik Jung How to do the lift off process after aluminumdeposition? It is negative resist. 2005-03-31 Hongjun-ECE 2005-03-31 Duan How to do the lift off process afteraluminumdeposition? Itis negative resist. 2005-03-31 Jesse D Fowler How to do the lift off process afteraluminumdeposition? It is negative resist. 2005-03-31 Hongjun-ECE How to do the lift off process afteraluminumdeposition? It is negative resist. 2005-03-31 Brent Garber How to do the lift off process after aluminumdeposition? It is negative resist. 2005-03-31 Shile How to do the lift off process after aluminumdeposition? It is negative resist. Hongjun-ECE 2005-03-31 What type of negative resist are you using? If SU8 with the pattern, it is pretty hard to have a liftoff. If you just want negative resist without any other requirement, AZ5214 would be the best. Good luck. Hongjun Zeng, PhD reply
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