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MEMSnet Home: MEMS-Talk: Plasma etching with sloped sidewalls.
Plasma etching with sloped sidewalls.
2005-03-30
Bruce Altemus
2005-03-30
Isaac Wing Tak Chan
2005-03-30
Shane Arthur McColman
2005-03-30
Bruce Altemus
2005-03-30
Isaac Wing Tak Chan
2005-03-31
Robert Dean
2005-03-31
Wilson, Thomas
2005-04-06
[email protected]
Plasma etching with sloped sidewalls.
Wilson, Thomas
2005-03-31
Dear Robert,

Any idea what sort of surface smoothness might result.

>I think refractive micro-optics companies use a gray-scale lithography
>process to make micro-lenses and other finely controlled arbitrarily
>shaped etched microstructures.  It might be worthwhile to consult one
>of them.

reply
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