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MEMSnet Home: MEMS-Talk: How to do the lift off process after aluminumdeposition? It is negative resist.
How to do the lift off process after aluminum deposition? It is negative resist.
2005-03-31
Duan
How to do the lift off process after aluminumdeposition? Itis negative resist.
2005-03-31
Jesse D Fowler
microstructured Pt thermal sensor
2005-04-01
Erik Jung
How to do the lift off process after aluminumdeposition? It is negative resist.
2005-03-31
Hongjun-ECE
2005-03-31
Duan
How to do the lift off process afteraluminumdeposition? Itis negative resist.
2005-03-31
Jesse D Fowler
How to do the lift off process afteraluminumdeposition? It is negative resist.
2005-03-31
Hongjun-ECE
How to do the lift off process afteraluminumdeposition? It is negative resist.
2005-03-31
Brent Garber
How to do the lift off process after aluminumdeposition? It is negative resist.
2005-03-31
Shile
How to do the lift off process after aluminumdeposition? It is negative resist.
Duan
2005-03-31
Hi all,

Thanks for your help.

For me, what I have done is
I had a 6'' silicon wafer and I coated it with negative photo resist
(Arch Chemicals HNR80), 1 micron in thickness, I think.  It was
exposed under UV light, and then developed.  After this, I evaporated
a thin aluminum film onto the wafer, one micron thick.  Then I need to
do the lift off process to pattern the aluminum.  However, I got
failed in doing so.  It seems like that, the acetone can not etch the
negative PR, which works well in removing positive PR.
So I need to figure out another way or find out another solvent to do
this.  Could you give me some suggestion?

Thanks very much.

Duan

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