How to do the lift off process
afteraluminumdeposition? It is negative resist.
Hongjun-ECE
2005-03-31
I never used the resist you mentioned. But two points would be noted: 1).
1um resist with 1um metal can not give you a good result of liftoff--the
metal buries the side wall and block the solvent coming in. 2). The resist
had strong crosslink at the exposed place so acetone can not dissolve it.
Why not contact the resist vendor to ask if this type of resist has a
remover. I think a lot of resist have remover. If yes, than would be the one
you are looking for.
Good luck,
Hongjun Zeng, PhD
