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MEMSnet Home: MEMS-Talk: How to do the lift off process afteraluminumdeposition? It is negative resist.
How to do the lift off process after aluminum deposition? It is negative resist.
2005-03-31
Duan
How to do the lift off process after aluminumdeposition? Itis negative resist.
2005-03-31
Jesse D Fowler
microstructured Pt thermal sensor
2005-04-01
Erik Jung
How to do the lift off process after aluminumdeposition? It is negative resist.
2005-03-31
Hongjun-ECE
2005-03-31
Duan
How to do the lift off process afteraluminumdeposition? Itis negative resist.
2005-03-31
Jesse D Fowler
How to do the lift off process afteraluminumdeposition? It is negative resist.
2005-03-31
Hongjun-ECE
How to do the lift off process afteraluminumdeposition? It is negative resist.
2005-03-31
Brent Garber
How to do the lift off process after aluminumdeposition? It is negative resist.
2005-03-31
Shile
How to do the lift off process afteraluminumdeposition? It is negative resist.
Brent Garber
2005-03-31
Duan,

Here are a few tips.  Most people make their resist 2.5 times thicker than
their metal.  Most negative resists come with their own solvent.  Acetone
doesn't work.  Check with Arch Chemicals.

Brent

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