MEMS-talk

News	MEMSnet Home: MEMS-Talk: microstructured Pt thermal sensor How to do the lift off process after aluminum deposition? It is negative resist. 2005-03-31 Duan How to do the lift off process after aluminumdeposition? Itis negative resist. 2005-03-31 Jesse D Fowler microstructured Pt thermal sensor 2005-04-01 Erik Jung How to do the lift off process after aluminumdeposition? It is negative resist. 2005-03-31 Hongjun-ECE 2005-03-31 Duan How to do the lift off process afteraluminumdeposition? Itis negative resist. 2005-03-31 Jesse D Fowler How to do the lift off process afteraluminumdeposition? It is negative resist. 2005-03-31 Hongjun-ECE How to do the lift off process afteraluminumdeposition? It is negative resist. 2005-03-31 Brent Garber How to do the lift off process after aluminumdeposition? It is negative resist. 2005-03-31 Shile microstructured Pt thermal sensor Erik Jung 2005-04-01 Dear colleagues, do you have experience in microstructuring platinum for thermal sensors? Is there a commercial supplier or an institute doing such sensors? Range of reliable thermal operation should be -100?C...+200?C and response time <10ms. For the application I am doing this inquiry, currently Pt thermal sensor wires are used. Regards! Erik Jung Fraunhofer IZM Berlin/Germany reply
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