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MEMSnet Home: MEMS-Talk: Problem in photolithography
Problem in photolithography
2005-04-01
[email protected]
2005-04-01
Kamat Mahesh Keshav
2005-04-01
Haroon Lais
2005-04-01
Brubaker Chad
2005-04-02
Mahesh Pitchumani
Problem in photolithography
Kamat Mahesh Keshav
2005-04-01
What photoresist is this?

In fact this happens with some photoresists...i have come across this
problem recently. Though a microscope image shows that the resist has been
stripped, my glass wafer is still hydrophobic.

Would be great if someone could tell why this happens

Thanks
MK

> my spin speed is 4000rpm with a ramp of 30000r/s, and the prebake
> temperature is 100 degree c with a time of 1 minute, but there is always
> some photoresist
> remained no matter how long the develop time, why? Is the pre bake
> temperature too high and the the photoresist been destroyed?

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