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MEMSnet Home: MEMS-Talk: Mechanical properties for orthotropic SiN
Mechanical properties for orthotropic SiN
2005-04-01
Maryna Lishchynska
2005-04-01
Xiao Li Wang
Mechanical properties for orthotropic SiN
Xiao Li Wang
2005-04-01
hiya,

Maybe you can try the following website:

http://www.memsnet.org/material/siliconnitridesi3n4/

http://parts.jpl.nasa.gov/docs/JPL%20PUB%2099-1D.pdf

xiaoli wang


>Does anybody know where material properties (Young's modulus at least) of
>orthotropic SiN can be found?

reply
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