A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Piranha question
Piranha question
2005-04-01
Kamat Mahesh Keshav
2005-04-01
Bill Moffat
2005-04-02
Roger Brennan
2005-04-04
Joe Lonjin
Piranha question
Roger Brennan
2005-04-02
Yes, all true!

If you are doing production, you can save time and chemicals by heating the
sulfuric to something like 90-100 degrees and then put a LITTLE bit of
hydrogen peroxide in it at the time you put in the wafers.  Ammonium
persulfate works even better.  BE CAREFUL!  Consult your safety people. Wear
safety equipment!  You do not want this stuff on your person!

If the resist coating is quite thick, the wafers may want to float out of
the etch baskets.  You might want to experiment with dummy wafers before
risking important ones.

Roger Brennan

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.
Mentor Graphics Corporation