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MEMSnet Home: MEMS-Talk: bonding process need help on..!
Deep etch of microchannels
2005-04-01
Harry Lockwood
2005-04-02
RICHARD TOFTNESS
bonding process need help on..!
2005-04-02
[email protected]
bonding process need help on..!
[email protected]
2005-04-02
Hi everyone

Does anyone know what is the bonding process that is used in bonding /
bridging a CMOS substrate to a mem's aluminum substrate..?

Cheers
Mr. Arie Ross

reply
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