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MEMSnet Home: MEMS-Talk: Lift Off Resist coating in deep trenches
Lift Off Resist coating in deep trenches
2005-04-04
Sachin Goyal
2005-04-05
Jacobs, Michael
Acetone resist strip baths
2005-04-05
Patrick Roman
Lift Off Resist coating in deep trenches
Sachin Goyal
2005-04-04
Hi everybody,

We require to do lift-off Gold process on 3.5 micron thick poly-silicon
structural layer on a device having comb structure... We are using LOR 15A
and image resist over that and are facing lot of difficulties with coat
process. Can anyone suggest some solution.

We need Gold only over pads!

Thanks,
Sachin


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